EDWARDS HT 擴散泵浦
 |
| Model | HT 10 | HT 16B | HT 20B | |
| Comparative pumping Speed | Ixs-1 | 4650 | 11580 | 18000 |
| Nitrogen | Ixs-1 | 3000 | 6500 | 8000 |
| Helium | Ixs-1 | 4650 | 7200 | 16000 |
| Fluid Change | ml | 1250 | 2400 | 3600 |
| Recommended backing pump | GV80,E2M80 |
GV80,GXS250,
E2M175
|
GXS250,E2M175 | |
| Heater Power | 5.1 | 9 | 12.6 | |
| Weight | kg | 80 | 185 | 275 |